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Lithographic Process and Its Materials
The characteristics of each photolithography process from 'adhesion promotion to hard bake' and their considerations are explained. You will learn about the evaluation of photoresists, the concept and characteristics of resist by wavelength and by layer. Patterning enhancement materials are also explained. This course will give you an understanding of the photolithography process and its materials
1. Introduction
2. Legacy Resists
3. Lithographic Process
4. Patterning Enhancement Materials
- 2010 ~ 2023
SEMES 수석
- 1986 ~ 2009
삼성전자 반도체 연구소 (Mask 개발팀 및 공정개발팀)
- 고려대학교 화학과 석사