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우상균 연구위원

전 SEMES

Lithographic Process and Its Materials

The characteristics of each photolithography process from 'adhesion promotion to hard bake' and their considerations are explained. You will learn about the evaluation of photoresists, the concept and characteristics of resist by wavelength and by layer. Patterning enhancement materials are also explained. This course will give you an understanding of the photolithography process and its materials

1. Introduction

2. Legacy Resists

3. Lithographic Process

4. Patterning Enhancement Materials

- 2010 ~ 2023
       SEMES 수석

- 1986 ~ 2009
      삼성전자 반도체 연구소 (Mask 개발팀 및 공정개발팀)

- 고려대학교 화학과 석사

리소그래피 분과

학회 사무국 : 010-3755-6870

대표 이메일 : 2024ngl.contact@gmail.com

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