| 1st Day | Aug. 12, 2024 (Mon.)
MI-I
Advanced Metrology / Inspection-I
405/406
10:45~12:15 KST
좌장: 이명준 (삼성전자)
MI-I-1
Advanced Metrology Journey for Future Device Challenges
*한상현 (NOVA)
Abstract
10:45~11:15
MI-I-2
Simulation-based MI and Digital Twin Technology for Semicoductor
*정재훈 (삼성전자)
Abstract
11:15~11:45
MI-I-3
Exploring Generalization Capability of Deep Learning-Based Approaches for Holographic Image Reconstruction: Opportunities in Semiconductor Metrology & Inspection
*장무석 (KAIST)
Abstract
11:45~12:15
