| 1st Day | Aug. 12, 2024 (Mon.)
MI-II
Advanced Metrology / Inspection-II
405/406
13:30-15:00 KST
좌장: 김욱래 (삼성전자)
MI-II-1
Broadband Plasma Inspection Technology and Semiconductor High-Volume Manufacturing
*Sean Park (KLA)
Abstract
13:30~14:00
MI-II-2
Multiscale Thermal Metrology Bridging Nanoscale to Device Scale for Semiconductor Inspection
*장혜진 (서울대)
Abstract
14:00~14:30
MI-II-3
3D Tomography for semiconductor device manufacturing: the art of transforming an academic curiosity into an advanced metrology and inspection technique.
*Eugen Foca (Zeiss)
Abstract
14:30~15:00
