| 2nd Day | Aug. 13, 2024 (Tue.)
AL-II
Alternative Lithography-II
403
15:20-16:50 KST
좌장: 김명기 (고려대)
AL-II-1
III-V/Si light source integration from on-demand to three-dimensional dimensions.
*노유신 (건국대)
Abstract
15:20~15:50
AL-II-2
Co-integration of zero-static-power nanomachines with silicon photonics
*한상윤 (DGIST)
Abstract
15:50~16:20
AL-II-3
Advanced Nanofabrications for Nanophotonics: 3D EBL, Single-digit Nanometer Scale EBL and scalable NIL
*김인기 (성균관대)
Abstract
16:20~16:50
