| 1st Day | Aug. 12, 2024 (Mon.)
ET-I
Advanced Etch Technology for Nanopatterning I
403
13:30-15:00 KST
좌장: 민경진 (명지대)
ET-I-1
Hard mask pattern processing for high aspect ratio contact etch
*이재원 (SK hynix)
Abstract
13:30~14:00
ET-I-2
A realistic 3D topography simulation platform for addressing emerging issues
*임연호 (전북대)
Abstract
14:00~14:30
ET-I-3
Novel plasma sources for atomic scale etching
*정진욱 (한양대)
Abstract
14:30~15:00
